Automated FOUP Cleaner

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Automated FOUP Cleaner

The fully automatic FOUP cleaning machine is designed for 12-inch production lines and integrates with AMHS crane systems for efficient cleaning and transport. It is ideal for semiconductor applications, including silicon substrates and advanced packaging, meeting strict FOUP/FOSB metal ion and particle cleaning standards.
With a multi-stage high-precision filtration system and various spray combinations for 360° coverage, it ensures thorough cleaning. The built-in vacuum drying and dehumidification system enhances efficiency, meeting low-humidity requirements with optional real-time monitoring.
- Supports EAP/MES/FDC communication protocols, SECS/GEM 200/300
- Compatible with OHT/PGV/AGV systems
- Complies with SEMI S2, 47, and CE standards and certifications

产品特点

Each chamber operates independently and can be adjusted according to process needs, enhancing production efficiency. The sealed design isolates the chambers from external contaminants, ensuring a continuously clean environment and effectively maintaining FOUP cleanliness after cleaning.

The equipment integrates an N2 filling system and humidity detection for the FOUP, allowing continuous monitoring and improvement of environmental conditions to prevent secondary contamination after cleaning.

Equipped with an advanced vacuum dehumidification system, it ensures the internal humidity of the FOUP reaches extremely low levels, meeting the stringent humidity control standards of the semiconductor industry.

The automatic Load Port design, combined with the E84 sensor, ensures stability and smooth integration with the OHT (automated crane system), automating the entire production process.

The optional Slot Mapping system allows real-time monitoring within the FOUP, detecting unremoved wafers and any potential wafer fragments, ensuring production safety and accuracy.

The equipment combines an industrial PC and PLC for simple and convenient operation, supporting SECS/GEM communication protocols to meet the intelligent demands of semiconductor production lines.

应用范围